首页   按字顺浏览 期刊浏览 卷期浏览 Enhanced crystallinity of silicon films grown from eutectic melt on aluminum sheets
Enhanced crystallinity of silicon films grown from eutectic melt on aluminum sheets

 

作者: Takeshi Saito,   Yasuo Seki,  

 

期刊: Applied Physics Letters  (AIP Available online 1976)
卷期: Volume 29, issue 9  

页码: 600-602

 

ISSN:0003-6951

 

年代: 1976

 

DOI:10.1063/1.89157

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Silicon films were grown from Al‐Si eutectic melt directly formed on aluminum sheets. High‐energy silicon atoms were deposited onto aluminum sheets at 420 °C in an argon discharge atmosphere of 5×10−4Torr using an rf ion‐plating system. A significant increase in the crystallinity of silicon films was observed from transmission electron diffraction studies. The mechanism of silicon eutectic growth on aluminum sheets is also discussed.

 

点击下载:  PDF (224KB)



返 回