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A novel model of ‘‘new donors’’ in Czochralski‐grown silicon

 

作者: J. J. Qian,   Z. G. Wang,   S. K. Wan,   L. Y. Lin,  

 

期刊: Journal of Applied Physics  (AIP Available online 1990)
卷期: Volume 68, issue 3  

页码: 954-957

 

ISSN:0021-8979

 

年代: 1990

 

DOI:10.1063/1.346659

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A new model of ‘‘new donors’’ is presented, based on electrical, infrared measurements, transmission electron microscopy, and high‐resolution electron microscopy observations on Czochralski‐grown silicon single crystals containing ‘‘new donors.’’ In this model, the electrical activity of ‘‘new donors’’ originates from the uncoordinated Si dangling bonds on small dislocation loops resulting from oxygen precipitation. In comparison with other models, the present model can better explain the experimental results of the heat treatment Czochralski‐grown Si wafers.

 

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