Plasma‐deposited polymer coatings for scanning tunneling microscope tips

 

作者: Kenneth B. Lewis,   Buddy D. Ratner,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  （AIP Available online 1992）
卷期: Volume 10, issue 5  

页码: 2331-2332

 

ISSN:1071-1023

 

年代: 1992

 

DOI:10.1116/1.586063

 

出版商: American Vacuum Society

 

关键词: SCANNING TUNNELING MICROSCOPY;CHEMICAL VAPOR DEPOSITION;VAPOR DEPOSITED COATINGS;ELECTRICAL INSULATION;GLOW DISCHARGES;ETCHING;FLUORINATED ALIPHATIC HYDROCARBONS

 

数据来源: AIP

 

 

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