The influence of electrode geometry on liquid metal ion source performance
作者:
L. W. Swanson,
Jia Zheng Li,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1988)
卷期:
Volume 6,
issue 4
页码: 1062-1065
ISSN:0734-211X
年代: 1988
DOI:10.1116/1.584298
出版商: American Vacuum Society
关键词: GALLIUM IONS;ION SOURCES;FABRICATION;LIQUID METALS;FLUID FLOW;BEAM PRODUCTION;ION BEAMS;DESIGN;PERFORMANCE;ETCHING;ELECTRODES;OPERATION;GALLIUM
数据来源: AIP
摘要:
The surface electric field distribution along the axis of a wetted needle type liquid metal ion source has been determined by numerical methods and is shown to exhibit a secondary maximum at the intersection of the cylindrical and conical sections. It is shown that the volume flow rate of the liquid metal film along the cylindrical portion of the emitter is adequate to resupply the ionized portion at the needle apex. However, a pressure minimum in the liquid film, which decreases with increasing apex cone angle, occurs at the cone/cylinder intersection and the pressure gradient formed on the conical section of the emitter opposes flow to the apex region. It is shown that, by chemically roughening the conical section of the emitter, liquid film flow via microcapillary action occurs in such a way as to provide a low flow impedance to the apex.
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