Crater‐edge profiling in interface analysis employing ion‐beam etching and AES
作者:
N. J. Taylor,
J. S. Johannessen,
W. E. Spicer,
期刊:
Applied Physics Letters
(AIP Available online 1976)
卷期:
Volume 29,
issue 8
页码: 497-499
ISSN:0003-6951
年代: 1976
DOI:10.1063/1.89136
出版商: AIP
数据来源: AIP
摘要:
The crater edge formed in Si‐SiO2films by appropriate ion‐beam etching provides an angle‐lapped surface analogous to that produced by usual mechanical means; however, the angle can be usefully reduced by 3 orders of magnitude, allowing much greater spatial resolution. Furthermore, in contrast to conventional depth profiling, the separation of the etching and analysis permits repetitive measurements to be made conveniently; a fact of considerable utility in interface analysis.
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