Micromachined infrared sensors using tunneling displacement transducers
作者:
T. W. Kenny,
J. K. Reynolds,
J. A. Podosek,
E. C. Vote,
L. M. Miller,
H. K. Rockstad,
W. J. Kaiser,
期刊:
Review of Scientific Instruments
(AIP Available online 1996)
卷期:
Volume 67,
issue 1
页码: 112-128
ISSN:0034-6748
年代: 1996
DOI:10.1063/1.1146559
出版商: AIP
数据来源: AIP
摘要:
Uncooled infrared sensors are important for a number of technological and scientific measurements. We have designed, built, and tested a new uncooled infrared sensor which is made by silicon micromachining. This infrared sensor uses a tunneling displacement transducer to detect the thermal expansion of a small volume of trapped gas. Prototype devices based on this design have been operated with NEP better than 3×10−10W/&sqrt;Hz at 25 Hz, which is competitive with the best comparably sized uncooled sensors available. This article will describe the design, fabrication, and operation of all elements of this sensor. ©1996 American Institute of Physics.
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