The structural and electric properties of PZT thin films deposited by the sol-gel process on RuO2coated stainless steel as well as on bare stainless steel were studied and compared. As-deposited amorphous RuO2thin films on stainless steel were transformed to pure rutile-type RuO2at temperatures ranging from 400°C to 600°C, the resistivity of which had a value less than 200 μΩ ° cm. The PZT films processed on RuO2needed slightly higher temperature (610°C) in order to be completely transformed into the perovskite phase than PZT on stainless steel (600°C). The films showed best ferroelectric properties when depositing it on the 100 nm thick RuO2bottom electrodes fired at 400°C for 10 minutes. The hysteresis loops of the PZT films were more slim when being processed on RuO2coated stainless steel than on bare stainless steel. For the RuO2bottom electrodes the values of coercive field decreased to about 55% of those without a RuO2layer.