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A coupled laser scanning electron microscope system for investigating laser materials interactions

 

作者: Thomas J. Magee,   Peter Krehl,   Kenneth Hirschberg,   Jan Terry,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1974)
卷期: Volume 45, issue 7  

页码: 907-910

 

ISSN:0034-6748

 

年代: 1974

 

DOI:10.1063/1.1686765

 

出版商: AIP

 

数据来源: AIP

 

摘要:

This paper reports the development of a coupled laser scanning electron microscope system that enables a laser beam to be introduced into the microscope sample cavity and permits active‐mode monitoring of surface modifications during or subsequent to laser pulsing. Instrumentation is also incorporated within the system design for measuring laser induced pressures and equivalent laser coupling coefficients in target materials.

 

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