A coupled laser scanning electron microscope system for investigating laser materials interactions
作者:
Thomas J. Magee,
Peter Krehl,
Kenneth Hirschberg,
Jan Terry,
期刊:
Review of Scientific Instruments
(AIP Available online 1974)
卷期:
Volume 45,
issue 7
页码: 907-910
ISSN:0034-6748
年代: 1974
DOI:10.1063/1.1686765
出版商: AIP
数据来源: AIP
摘要:
This paper reports the development of a coupled laser scanning electron microscope system that enables a laser beam to be introduced into the microscope sample cavity and permits active‐mode monitoring of surface modifications during or subsequent to laser pulsing. Instrumentation is also incorporated within the system design for measuring laser induced pressures and equivalent laser coupling coefficients in target materials.
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