Electromigration in aluminum conductors which are chains of single crystals
作者:
J. M. Pierce,
M. E. Thomas,
期刊:
Applied Physics Letters
(AIP Available online 1981)
卷期:
Volume 39,
issue 2
页码: 165-168
ISSN:0003-6951
年代: 1981
DOI:10.1063/1.92649
出版商: AIP
数据来源: AIP
摘要:
Electromigration was investigated in 1×4×250 &mgr;m aluminum conductors which were recrystallized to produce chains of single‐crystal grains, ’’bamboo’’ structures. Median lifetimes were substantially longer than are found in normal polycrystalline Al, reflecting the lack of grain boundary diffusion paths. However, mass fluxes estimated from damage features were larger and more variable than is consistent with a normal lattice diffusion mechanism. An enhanced lattice diffusion mechanism is proposed to account for these observations.
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