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Electromigration in aluminum conductors which are chains of single crystals

 

作者: J. M. Pierce,   M. E. Thomas,  

 

期刊: Applied Physics Letters  (AIP Available online 1981)
卷期: Volume 39, issue 2  

页码: 165-168

 

ISSN:0003-6951

 

年代: 1981

 

DOI:10.1063/1.92649

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Electromigration was investigated in 1×4×250 &mgr;m aluminum conductors which were recrystallized to produce chains of single‐crystal grains, ’’bamboo’’ structures. Median lifetimes were substantially longer than are found in normal polycrystalline Al, reflecting the lack of grain boundary diffusion paths. However, mass fluxes estimated from damage features were larger and more variable than is consistent with a normal lattice diffusion mechanism. An enhanced lattice diffusion mechanism is proposed to account for these observations.

 

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