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Defects in organometallic vapor‐phase epitaxy‐grown GaInP layers

 

作者: S. L. Feng,   J. C. Bourgoin,   F. Omnes,   M. Razeghi,  

 

期刊: Applied Physics Letters  (AIP Available online 1991)
卷期: Volume 59, issue 8  

页码: 941-943

 

ISSN:0003-6951

 

年代: 1991

 

DOI:10.1063/1.106308

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Nonintentionally doped metalorganic vapor‐phase epitaxy Ga1−xInxP layers, having an alloy composition (x= 0.49) corresponding to a lattice matched to GaAs, grown by metalorganic chemical vapor deposition, have been studied by capacitance‐voltage and deep‐ level transient spectroscopy techniques. They are found to exhibit a free‐carrier concentration at room temperature of the order of 1015cm−3. Two electron traps have been detected. The first one, at 75 meV below the conduction band, is in small concentration (∼ 1013cm−3) while the other, at about 0.9 eV and emitting electrons above room temperature, has a concentration in the range 1014–1015cm−3.

 

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