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Displacement current and multiple pulse effects in plasma source ion implantation

 

作者: Blake P. Wood,  

 

期刊: Journal of Applied Physics  (AIP Available online 1993)
卷期: Volume 73, issue 10  

页码: 4770-4778

 

ISSN:0021-8979

 

年代: 1993

 

DOI:10.1063/1.353841

 

出版商: AIP

 

数据来源: AIP

 

摘要:

In plasma source ion implantation (PSII), a target to be implanted is immersed in a weakly ionized plasma and pulsed to a high negative voltage. Plasma ions are accelerated toward the target and implanted in its surface. In this article, two factors in the analysis of these discharges are examined for the first time: (1) displacement current across the expanding sheath results in increased implant current and decreased implanted ion energy, with respect to existing models; and (2) ion depletion around the target due to high pulse repetition rates results in decreased implant current and dose. These effects are studied with analytic models and particle‐in‐cell simulations. Simulation results are compared to previously published PSII models.

 

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