Application of the transparency model to the description of single-crystal sputtering at small sliding angles of incident ions
作者:
A.M. Borisov,
期刊:
Radiation Effects
(Taylor Available online 1985)
卷期:
Volume 89,
issue 3-4
页码: 237-241
ISSN:0033-7579
年代: 1985
DOI:10.1080/00337578508222507
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
A model for crystal transparency is used to calculate the single-crystal sputtering yields at small sliding angles of ion incidence onto a target. The results of calculating the angular dependences of the (100) copper crystal face sputtering yield under 30 and 15 keV Ar and Ne ion bombardment prove to be in a satisfactory agreement with the available experimental data.
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