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Application of the transparency model to the description of single-crystal sputtering at small sliding angles of incident ions

 

作者: A.M. Borisov,  

 

期刊: Radiation Effects  (Taylor Available online 1985)
卷期: Volume 89, issue 3-4  

页码: 237-241

 

ISSN:0033-7579

 

年代: 1985

 

DOI:10.1080/00337578508222507

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

A model for crystal transparency is used to calculate the single-crystal sputtering yields at small sliding angles of ion incidence onto a target. The results of calculating the angular dependences of the (100) copper crystal face sputtering yield under 30 and 15 keV Ar and Ne ion bombardment prove to be in a satisfactory agreement with the available experimental data.

 

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