Thermal stability of Ta/Ge superlattices studied by Raman spectroscopy
作者:
Sunil Kumar,
H. J. Trodahl,
期刊:
Journal of Applied Physics
(AIP Available online 1993)
卷期:
Volume 73,
issue 4
页码: 1761-1763
ISSN:0021-8979
年代: 1993
DOI:10.1063/1.353211
出版商: AIP
数据来源: AIP
摘要:
The thermal behavior of Ta/Ge superlattices has been studied using Raman spectroscopy. The high‐frequency Raman spectra, obtained as a function of annealing temperature, reveal no significant change in the superlattice structure up to an anneal temperature of 400 °C. The interlayer diffusion at the Ta/Ge interfaces occurs at 500 °C followed by complete crystallization of the superlattice at 600 °C. Raman scattering from the folded acoustic modes of the superlattices was also employed to study the thermal behavior of superlattices, and the results thus obtained corroborate the above findings.
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