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Transmission Electron Microscopy: Overview and Challenges

 

作者: S. J. Pennycook,   A. R. Lupini,   A. Borisevich,   M. Varela,   Y. Peng,   P. D. Nellist,   G. Duscher,   R. Buczko,   S. T. Pantelides,  

 

期刊: AIP Conference Proceedings  （AIP Available online 1903）
卷期: Volume 683, issue 1  

页码: 627-633

 

ISSN:0094-243X

 

年代: 1903

 

DOI:10.1063/1.1622537

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We review recent advances in aberration‐corrected scanning transmission electron microscopy that allow sub‐A˚ngstrom beams to be used for imaging and spectroscopy, with enormous improvement in sensitivity for single atom detection and the investigation of interfacial electronic structure. Comparison is made between the electronic and structural width of gate oxides, with interpretation through first‐principles theory. Future developments are discussed. © 2003 American Institute of Physics

 

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