High‐Energy X‐ray Microprobe by Multilayer Zone Plate and Microscopy at SPring‐8
作者:
Shigeharu Tamura,
Masato Yasumoto,
Nagao Kamijo,
Yoshio Suzuki,
Mitsuhiro Awaji,
Akihisa Takeuchi,
Hidekazu Takano,
Kentaro Uesugi,
期刊:
AIP Conference Proceedings
(AIP Available online 1904)
卷期:
Volume 716,
issue 1
页码: 144-147
ISSN:0094-243X
年代: 1904
DOI:10.1063/1.1796602
出版商: AIP
数据来源: AIP
摘要:
Microfocusing experiments of high‐brilliance, high‐energy X‐ray by using a multilayer Fresnel zone plates were performed at SPring‐8. It is proved that the multilayer FZPs can be used as focusing elements with high spatial resolution in a wide range X‐ray wavelength domain up to 100 keV. A Cu/Al FZP with the thickness of 40 micron has attained the spatial resolution of 0.7 ∼ 1.8 micron in a wide range X‐ray wavelength domain of 18.6 ∼ 113 keV. Three types of microscopic image of an Au mesh with 1500 lines per inch were taken by a X‐ray microscopy experiment by using the multilayer FZP at 82 keV: a scanning microscopic transmission image, a scanning microscopic fluorescent one and an imaging microscopic one with the spatial resolution of ∼ 0.7 micron. High‐energy X‐ray microprobe by using the multilayer FZP will be powerful tool for non‐destructive various analyses of thick materials (bulk, IC, etc) with submicron spatial resolution. © 2004 American Institute of Physics
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