Nitridization of gallium arsenide surfaces: Effects on diode leakage currents
作者:
S. J. Pearton,
E. E. Haller,
A. G. Elliot,
期刊:
Applied Physics Letters
(AIP Available online 1984)
卷期:
Volume 44,
issue 7
页码: 684-686
ISSN:0003-6951
年代: 1984
DOI:10.1063/1.94877
出版商: AIP
数据来源: AIP
摘要:
Nitridization of GaAs surfaces by exposure to a nitrogen or nitrogen‐hydrogen plasma is known to form a surface coating rich in GaN. We show that pretreatment in a hydrogen plasma at room temperature followed by production of this wider band‐gap material by nitrogen plasma treatment at 500 °C for 5 h reduces the reverse leakage current of Au‐GaAs (ND−NA=5×1017cm−3) Schottky diodes by typically an order of magnitude at 300 K.
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