Matrix isolation Fourier transform infrared spectroscopic study of energetic nitrogen fluxes applied to fabrication of nitride thin films. Observation ofN3radical and quantitative estimation of matrix-isolated N atoms
作者:
V. N. Khabashesku,
J. L. Margrave,
K. Waters,
J. A. Schultz,
期刊:
Journal of Applied Physics
(AIP Available online 1997)
卷期:
Volume 82,
issue 4
页码: 1921-1924
ISSN:0021-8979
年代: 1997
DOI:10.1063/1.366271
出版商: AIP
数据来源: AIP
摘要:
The formation of stable molecules such asNH3, NO,N2O, and HCN as well as reactive transient species, e.g., NH,NH2andN3, resulting from the reactions of energetic N atoms with a residual background ofH2Oand hydrogen in cryogenic solidN2matrices at temperatures of 12–27 K has been studied in situ by Fourier Transform Infrared spectroscopy (FTIR). Bombardment of the matrix by N andN2neutrals with estimated energies between 20 and 120 eV produces a concentration ofN3radicals linearly proportional to the beam flux. The lower limit concentration of active N atoms stored in a cryomatrix has been derived from FTIR spectroscopic measurements. ©1997 American Institute of Physics.
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