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Negative resistance switching in near‐perfect crystalline silicon film resistors

 

作者: P. Kenyon,   H. Dressel,  

 

期刊: Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films  (AIP Available online 1984)
卷期: Volume 2, issue 4  

页码: 1486-1490

 

ISSN:0734-2101

 

年代: 1984

 

DOI:10.1116/1.572388

 

出版商: American Vacuum Society

 

关键词: SILICON;SWITCHING;ELECTRIC CONDUCTIVITY;IV CHARACTERISTIC;GRAIN BOUNDARIES;INTEGRATED CIRCUITS;RECRYSTALLIZATION;LASER RADIATION;ELECTRIC POTENTIAL;DOPED MATERIALS;SEMICONDUCTOR RESISTORS;FILMS;Si

 

数据来源: AIP

 

摘要:

This paper describes negative resistance switching inn‐type silicon film resistors which contain linear arrays of grain boundaries. These linear arrays have been predictably located in the active region by a laser recrystallization procedure. The grain boundaries are made to bisect the resistors. Effects of parameters such as grain boundary number and grain‐dopant concentration have been examined. We show that quasisaturated and asymmetricalI–Vcharacteristics are exhibited by our resistors. This is evidence that the voltages across the depletion region and across the grain boundary layer are not equally divided on each side of the junction, and that dopants are nonuniformly incorporated in the grains during laser recrystallization.

 

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