Auger electron spectroscopy and microscopy with probe‐size limited resolution
作者:
G. G. Hembree,
J. S. Drucker,
F. C. H. Luo,
M. Krishnamurthy,
J. A. Venables,
期刊:
Applied Physics Letters
(AIP Available online 1991)
卷期:
Volume 58,
issue 17
页码: 1890-1892
ISSN:0003-6951
年代: 1991
DOI:10.1063/1.105064
出版商: AIP
数据来源: AIP
摘要:
High spatial resolution Auger electron spectra and images have been obtained by optimizing secondary electron collection efficiency in a scanning transmission electron microscope (STEM). We describe an ultrahigh vacuum, 100 keV STEM which is capable of collecting Auger electron spectra and images with edge resolutions of ≤5 nm. Typical spectra and images from the Ge/Si(100) and Ag/Si(100) film growth systems are presented and discussed. These images demonstrate high‐resolution elemental mapping which can be used in the study of surface processes on the nanometer scale.
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