Electrical properties of the contacts with different contact materials on superconducting YBCO thin films were extensively investigated. The different contact materials including Au, Pd/Au, Ag, Yb/Cr/Al, RuO2, RuO2/Au, and RuO2/Ag were chosen to explore the possibility of fabricating low resistance contacts on superconducting YBCO films with processes and materials compatible with semiconductor technology. Experimental results demonstrated the surface condition dependent contact properties regardless of the contact materials. Reproducible and controllable contacts were realized by using RuO2or the combination of RuO2with other metals.