Design of guided‐wave components using growth of GaAs/AlGaAs superlattices on patterned substrates by organometallic chemical vapor deposition
作者:
E. Colas,
A. Yi‐Yan,
R. Bhat,
M. Seto,
R. J. Deri,
期刊:
Applied Physics Letters
(AIP Available online 1989)
卷期:
Volume 54,
issue 16
页码: 1501-1503
ISSN:0003-6951
年代: 1989
DOI:10.1063/1.101334
出版商: AIP
数据来源: AIP
摘要:
We demonstrate how an adequate choice of growth conditions and GaAs/AlGaAs superlattice series leads to a desired refractive index profile and to confinement of light at the cusp of a planarized structure over a previously photolithographically etched groove. Waveguiding at 1.52 &mgr;m wavelength with measured propagation losses of 1.5 dB/cm was obtained in these structures. The effect of growth parameters is discussed and potential applications of this concept to other structures suitable for guided‐wave devices are proposed.
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