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Fabrication and performance of coplanar ferroelectric phase shifter

 

作者: W. Wilber,   W. Drach,   T. Koscica,   R. Babbitt,   L. Sengupta,   S. Sengupta,  

 

期刊: Integrated Ferroelectrics  (Taylor Available online 1998)
卷期: Volume 19, issue 1-4  

页码: 149-158

 

ISSN:1058-4587

 

年代: 1998

 

DOI:10.1080/10584589808012701

 

出版商: Taylor & Francis Group

 

关键词: Ferroelectric;thin films;phase shifter

 

数据来源: Taylor

 

摘要:

Coplanar ferroelectric phase shifters have been fabricated from thin films of barium strontium titanate (BST) and gold coplanar waveguide. The ability for these devices to provide a variable phase shift is based upon the change in dielectric constant of the BST with an applied de bias. We have fabricated coplanar phase shifters by three different series of fabrication steps. For each of the three devices, MgO was used as the substrate, and the BST films were deposited by laser ablation. We describe the coplanar design, material deposition, and the high frequency testing. The phase shifters were tested at frequencies up to 35 GHz.

 

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