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Indirectly heated cathode arc discharge source for ion implantation of semiconductors

 

作者: Thomas N. Horsky,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1998)
卷期: Volume 69, issue 4  

页码: 1688-1690

 

ISSN:0034-6748

 

年代: 1998

 

DOI:10.1063/1.1148866

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We describe an indirectly heated cathode ion source which has several times the lifetime of commercial Bernas sources which incorporate a bare filament cathode. In addition, much higher multiply charged beam currents are attainable using this source due to its ability to operate safely at higher arc discharge power. In addition to an overall system description, we present typical lifetimes and ion species fractions, and the latter’s dependence on source operating parameters such as arc voltage and source magnetic field. Data are presented for boron, arsenic, and phosphorus beams. Cathode lifetime ranges from 70 h at the highest discharge power levels to over 500 h for moderate operation. At high discharge power levels (≈1 kW), the ions are predominantly atomic, rather than molecular, species. Multiply charged beam production also increases with discharge power and plasma density. Doubly charged fractions of 15&percent; for phosphorus, and 2&percent; for boron, have been demonstrated during ion implant.©1998 American Institute of Physics.

 

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