Atomic force microscope-based data storage using replicated media
作者:
B. D. Terris,
S. A. Rishton,
H. J. Mamin,
M. E. Best,
J. A. Logan,
D. Rugar,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1997)
卷期:
Volume 15,
issue 4
页码: 1584-1587
ISSN:1071-1023
年代: 1997
DOI:10.1116/1.589406
出版商: American Vacuum Society
数据来源: AIP
摘要:
We have developed a technique for both mastering and replicating data patterns for potential use in an atomic force microscope (AFM)-based data storage device. The process consists of using electron beam lithography to write data features as small as 50 nm and a photopolymerization process to faithfully replicate the written marks. The replicas can be read using a contact-mode AFM tip on a rotating disk, and no change in the signal is seen after 12 days of continuous reading.
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