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The role of heavy particles in kinetics of low current discharges in argon at high electric field to gas number density ratio

 

作者: Z. Lj. Petrović,   V. D. Stojanović,  

 

期刊: Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films  (AIP Available online 1998)
卷期: Volume 16, issue 1  

页码: 329-336

 

ISSN:0734-2101

 

年代: 1998

 

DOI:10.1116/1.580991

 

出版商: American Vacuum Society

 

数据来源: AIP

 

摘要:

We have developed a coupled system of Monte Carlo simulation codes for modeling of electron, ion, and fast neutral kinetics in low pressure, low current discharges. The procedure was tested for ion drift tube data by using different cross-section sets including the recent anisotropic set of Phelps [A. V. Phelps, J. Appl. Phys.76, 747 (1994)]. The code was applied to modeling absolute emission profiles obtained at very high electric field to gas number density ratio, where heavy particle excitation dominates electron excitation by more than two orders of magnitude, and also to an inhomogeneous field experiment of Scott and Phelps [D. A. Scott and A. V. Phelps, Phys. Rev. A43, 3043 (1991)]. The qualitative agreement between the Monte Carlo and experimental results is good, giving confidence in the available models and data for ion and fast neutral transport in gas discharges, and for their interaction with surfaces.

 

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