Efficient high‐homogeneous wide‐aperture excimer discharge using a stabilizing low‐current predischarge
作者:
Yu. Bychkov,
I. Kostyrya,
M. Makarov,
A. Suslov,
A. Yastremsky,
期刊:
Review of Scientific Instruments
(AIP Available online 1994)
卷期:
Volume 65,
issue 4
页码: 793-798
ISSN:0034-6748
年代: 1994
DOI:10.1063/1.1145236
出版商: AIP
数据来源: AIP
摘要:
A technique of initiation of a self‐sustained electrical discharge for pumping excimer lasers, based on the use of a stabilizing predischarge with an electron densityNe∼1012–1013cm−3, has been developed. It has been demonstrated that such an auxiliary discharge is stable for random disturbances of the plasma parameters. An efficient, stable, and highly homogeneous pumping discharge of duration up to 800 ns with an aperture of 6×12 cm2and current density of ∼300 A/cm2has been realized in Ne(He,Ar)/Xe(Kr)/HCl mixtures. The proposed technique can be used in developing wide‐aperture excimer lasers and shows promise for creating high‐repetition‐rate systems of kilowatt average power.
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