Erratum: Determination of electrode/substrate surface temperatures through the solid–liquid transition of metals/eutectics in capacitively coupled radio frequency‐plasma chemical vapor deposition reactors [J. Vac. Sci. Technol. A8, 3954 (1990)]

 

作者: M. Shinohara,   H. Tashiro,   K. Saio,   K. Arai,   K. Takayama,  

 

期刊: Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films  （AIP Available online 1991）
卷期: Volume 9, issue 6  

页码: 3183-3183

 

ISSN:0734-2101

 

年代: 1991

 

DOI:10.1116/1.577144

 

出版商: American Vacuum Society

 

数据来源: AIP

 

 

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