Reduction of iron solubility in silicon with oxygen precipitates
作者:
Etienne G. Colas,
Eicke R. Weber,
期刊:
Applied Physics Letters
(AIP Available online 1986)
卷期:
Volume 48,
issue 20
页码: 1371-1373
ISSN:0003-6951
年代: 1986
DOI:10.1063/1.96913
出版商: AIP
数据来源: AIP
摘要:
The solubilities of iron in samples treated with various oxygen precipitation treatments were compared. The solubility of iron was reduced by almost two orders of magnitude in samples containing low‐temperature oxygen precipitates. It is suggested that a new phase forms, probably an oxygen‐metal rich compound that is more stable than the FeSi2silicide. This study suggests dramatic improvements for the efficiency of gettering processes.
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