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Scanning attractive force microscope using photothermal vibration

 

作者: N. Umeda,   S. Ishizaki,   H. Uwai,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  （AIP Available online 1991）
卷期: Volume 9, issue 2  

页码: 1318-1322

 

ISSN:1071-1023

 

年代: 1991

 

DOI:10.1116/1.585187

 

出版商: American Vacuum Society

 

关键词: ATOMIC FORCE MICROSCOPY;THERMO−OPTICAL EFFECTS;MECHANICAL VIBRATIONS;LASER RADIATION;ABSORPTION;MAGNETIC DISKS;MAGNESIUM ALLOYS;ALUMINIUM ALLOYS;SURFACES;IMAGES;Mg–Al;PHOTOTHERMAL EFFECTS

 

数据来源: AIP

 

摘要:

An attractive force microscope using photothermal vibration is presented. A cantilever is vibrated by the optical absorption of a laser beam whose intensity modulation frequency is at resonance frequency, and the vibration is detected by an optical deflection method. The characteristics of the photothermal vibration and the attractive force gradient versus tip‐sample distance have been measured with a Ni foil cantilever. Topographic images of digital memory disks made from a polycarbonate and Mg–Al alloy were recorded.

 

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