A Comparison of Three Techniques for Depositing DLC Films at Temperatures Between 25 and 100°C
作者:
I.S. Athwal,
E.A. Ogryzlo,
期刊:
Molecular Crystals and Liquid Crystals Science and Technology. Section A. Molecular Crystals and Liquid Crystals
(Taylor Available online 1992)
卷期:
Volume 219,
issue 1
页码: 183-192
ISSN:1058-725X
年代: 1992
DOI:10.1080/10587259208032133
出版商: Taylor & Francis Group
关键词: Diamond like carbon;Thin films;Pulsed laser ablation;Microwave plasma;Acetylene flame
数据来源: Taylor
摘要:
Diamond-Like Carbon (DLC) films have been deposited on silicon, glass and plastic surfaces by three different techniques: (a) Pulsed Laser Ablative Deposition, (b) Remote Microwave or DC Plasma Deposition, and (c) Moving Acetylene Flame Deposition. All three techniques were found to be capable of depositing hard films on these surfaces without raising the substrate temperatures above 100°C. The films produced were analyzed by X-ray, electron, Raman, IR, and visible spectroscopy, for hardness and adhesion, and by SEM for surface morphology. An extensive search for the optimum conditions for the formation of hard, adhering and transparent films has shown that it is essential that during the deposition process the surface is bombarded by high energy positive ions. The optimum conditions were found to be most easily achieved with a glow discharge.
点击下载:
PDF (589KB)
返 回