作者: S. A. Edmiston,
期刊: Journal of Applied Physics (AIP Available online 1997) 卷期: Volume 81, issue 5
页码: 2282-2287
ISSN:0021-8979
年代: 1997
DOI:10.1063/1.364279
出版商: AIP
数据来源: AIP
摘要:
The impact of grain size on the average collection probability of fine grained (<10 &mgr;m) polycrystalline silicon has been investigated using a numerical device simulator. This model predicts that the collection probability can improve dramatically once the depletion regions around adjacent grain boundaries overlap. Thus, contrary to most analytical models, the collection probability is not monotonic with grain size. The collection probability has a local maximum at a grain size determined by the grain boundary trap state density. The magnitude of the improvement is dependent upon the grain boundary recombination velocity. ©1997 American Institute of Physics.
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