Electron densities and temperatures in a diamond-depositing direct-current arcjet plasma
作者:
E. A. Brinkman,
K. R. Stalder,
J. B. Jeffries,
期刊:
Journal of Applied Physics
(AIP Available online 1997)
卷期:
Volume 81,
issue 3
页码: 1093-1098
ISSN:0021-8979
年代: 1997
DOI:10.1063/1.363852
出版商: AIP
数据来源: AIP
摘要:
Langmuir probe measurements of electron density and temperature are made in the plume of a dc arcjet reactor. A dc arc is struck in an argon or argon/hydrogen mixture at 6 atm pressure and expands through a converging/diverging nozzle into the reactor with a pressure of 25 Torr. Methane and methane/nitric oxide are added in the diverging nozzle, and diamond film grows on a substrate in the gas plume. Electron temperatures of 1–2 eV are significantly hotter than the neutral gas temperature in the plume. Electron densities range from 1010to 1013cm−3, well above the Saha equilibrium for the gas temperature and pressure and well below the equilibrium for the electron temperature. ©1997 American Institute of Physics.
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