AbstractThe semi‐empirical Deutsch‐Märk (DM) formalism for the calculation of absolute cross sections for the single ionization of atoms has been extended to the calculation of cross sections for the double and triple ionization of ground state atoms. Detailed comparisons are made with available experimental data from threshold to 200 eV. In general, we find good agreement between the present calculations and the available experimental data. On that basis, we feel confident that the present formalism can be applied to predict double and triple ionization cross sections for those atoms, for which no experimental data are currently available, with an accuracy in the 30–50% range for impact energies where direct ionization processes dominate and where contributions from tightly bound inner shells can be neglected. This level of precision should be sufficient for modelling purposes and many other practical applic