Substrate selective deposition and etching of silicon thin films
作者:
W. Westlake,
M. Heintze,
期刊:
Journal of Applied Physics
(AIP Available online 1995)
卷期:
Volume 77,
issue 2
页码: 879-884
ISSN:0021-8979
年代: 1995
DOI:10.1063/1.359013
出版商: AIP
数据来源: AIP
摘要:
In this study investigations into silicon plasma deposition and etching using both a very high‐frequency plasma in dilute SiH4/H2near partial chemical equilibrium and the pulsed silane flow method are presented. Under the conditions used, simultaneous growth of microcrystalline silicon (&mgr;c‐Si:H) and etching of amorphous silicon (a‐Si:H) is observed. The results obtained support a &mgr;c‐Si:H growth model in which the net growth rate is regarded as the difference of a silicon deposition and an etch rate. By patterning amorphous silicon using laser crystallization it was possible to produce uniform and well resolved submicrometer microcrystalline silicon features. ©1995 American Institute of Physics.
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