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The nucleation and growth of germanium on (11¯02) sapphire deposited by molecular beam epitaxy

 

作者: D. J. Godbey,   M. E. Twigg,  

 

期刊: Journal of Applied Physics  (AIP Available online 1991)
卷期: Volume 69, issue 8  

页码: 4216-4221

 

ISSN:0021-8979

 

年代: 1991

 

DOI:10.1063/1.348392

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Single‐crystal germanium on (11¯02) sapphire films are grown after a substrate preanneal of 1400 °C and at growth temperatures above 700 °C. At a growth temperature of 800 °C, the nucleation site density was ∼1011cm−2. For thin germanium films, the isolated islands were singly oriented, with single‐crystal films obtained for thicker grown films. A 400 °C growth temperature on sapphire was insufficiently high to get epitaxial growth and produced polycrystallites. Growth at 400 °C on an 800 °C grown germanium template did result in epitaxy. However, a high fraction of the twinned orientation was produced, resulting in a bicrystalline film.

 

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