The application of polarized X-rays in energy dispersive X-ray fluorescence analysis (EDXRF) is prooved to be one method for improvement the sensitivity of trace analysis at rock- and soil-samples. The use of a high power X-ray tube in connection with an amorphous Barkla-scattering target for polarization makes possible the increase of peak-to-background ratios in a wide energy range (5 keV < E < 40 keV) in comparison to direct excitation. The influence of the polarization on the peak-to-background ratios at trace analysis at geological samples will be shown.