Observations on small‐angle diffraction rings from very thin vapor‐deposited layers have been carried out using a direct‐recording electron diffractometer. The rings are due to the island structure of the deposited layers. A detailed correlation has been made between ring location and island/island interferences by statistical evaluation of electron micrographs. (The occurrence of inner diffraction rings from various types of specimens was first noted by Mahl and Weitsch using an electron‐microscope technique.)