The effect of oxygen pressure on the characteristics of BaTiO3thin films synthesized by pulsed-laser deposition technique was studied systematically in the present work. These films are highly textured in the (110) orientation and exhibit a low growth rate (∼66 nm/min) when deposited under low oxygen pressure (<3 Pa). The films are (111)-preferentially oriented and grow at a higher rate (∼104 nm/min) when synthesized under high oxygen pressure (∼100 Pa). The (110)-textured films possess slightly larger lattice parameters than the (111)-preferred-oriented films; that is, a0(110)=0.4042 nm and a0(111)=0.3992 nm, respectively. The characteristics of the (110)-textured films are accounted for by the alternation of O2--O2-and Ba2+-O2-layers within the (110) lattice planes.