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Optical and electrical properties of boron‐implanted amorphous germanium thin films

 

作者: Gordon Wood Anderson,   John E. Davey,   James Comas,   Nelson S. Saks,   William H. Lucke,  

 

期刊: Journal of Applied Physics  (AIP Available online 1974)
卷期: Volume 45, issue 10  

页码: 4528-4533

 

ISSN:0021-8979

 

年代: 1974

 

DOI:10.1063/1.1663082

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Amorphous germanium films were implanted to high boron levels, ∼1021/cm3peak concentrations. Before and after implantation the conductivity measurements fit the relation log&sgr;∼T−1/4and no evidence of intravalence absorption was observed indicating that the Fermi level was near the center of the band gap. Thermoelectric power measurements indicated that the samples were weaklyntype before implantation andptype after implantation. The position of the fundamental absorption edge shifted to lower energy upon implantation and to higher energies upon subsequent anneals. Implanted recrystallized films were stronglyptype, exhibited intravalence absorption, and had very low dc activation energies.

 

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