High crystallinity Ba0.5Sr0.5TiO3thin films were deposited on LaAlO3substrates by pulsed laser deposition. A conductive metallic oxide, SrRuO3, provided not only a good bottom electrode for Ba0.5Sr0.5TiO3but also an excellent seed layer for epitaxial growth of Ba0.5Sr0.5TiO3on it. The epitaxial nature of the Ba0.5Sr0.5TiO3thin films on the LaAlO3substrate was confirmed by x-ray diffraction, Rutherford backscattering spectroscopy, and cross-sectional transmission electron microscopy. The quite good dielectric and electrical properties of crystalline Ba0.5Sr0.5TiO3thin films suggest that Ba0.5Sr0.5TiO3/SrRuO3is a good combination in terms of structural, electrical, and dielectric properties of Ba0.5Sr0.5TiO3thin films.