Measurements of spatial and temporal sheath evolution for spherical and cylindrical geometries in plasma source ion implantation
作者:
M. Shamim,
J. T. Scheuer,
John R. Conrad,
期刊:
Journal of Applied Physics
(AIP Available online 1991)
卷期:
Volume 69,
issue 5
页码: 2904-2908
ISSN:0021-8979
年代: 1991
DOI:10.1063/1.348600
出版商: AIP
数据来源: AIP
摘要:
A comparison of experimental measurements and numerical calculations of temporal and spatial sheath evolution is presented. Spherical targets of copper and stainless steel (radius=2 cm) and a cylindrical target (radius=0.95 cm, height=18 cm) were immersed in an argon plasma with plasma densities of 2×108–8×109cm−3and biased negatively (20–50 kV). A Langmuir probe was used to detect the propagating sheath edge. Experimental measurements of sheath edge position were in good agreement with those determined by numerical calculations.
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