首页   按字顺浏览 期刊浏览 卷期浏览 Measurements of spatial and temporal sheath evolution for spherical and cylindrical geo...
Measurements of spatial and temporal sheath evolution for spherical and cylindrical geometries in plasma source ion implantation

 

作者: M. Shamim,   J. T. Scheuer,   John R. Conrad,  

 

期刊: Journal of Applied Physics  (AIP Available online 1991)
卷期: Volume 69, issue 5  

页码: 2904-2908

 

ISSN:0021-8979

 

年代: 1991

 

DOI:10.1063/1.348600

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A comparison of experimental measurements and numerical calculations of temporal and spatial sheath evolution is presented. Spherical targets of copper and stainless steel (radius=2 cm) and a cylindrical target (radius=0.95 cm, height=18 cm) were immersed in an argon plasma with plasma densities of 2×108–8×109cm−3and biased negatively (20–50 kV). A Langmuir probe was used to detect the propagating sheath edge. Experimental measurements of sheath edge position were in good agreement with those determined by numerical calculations.

 

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