Comparison of hydrogen atom density measurements in three types of discharges usingH2–N2gas mixtures
作者:
B. N. Ganguly,
P. Bletzinger,
期刊:
Journal of Applied Physics
(AIP Available online 1997)
卷期:
Volume 82,
issue 10
页码: 4772-4776
ISSN:0021-8979
年代: 1997
DOI:10.1063/1.366334
出版商: AIP
数据来源: AIP
摘要:
Two-photon laser induced fluorescence measurement of H atom density in&percent;H2–&percent;N2gas mixture discharges has shown that the flux of H atom remains nearly constant over a wide range of gas compositions and pressures in three types of discharge devices. This unique feature is attributable to an efficient multiquantumN2vibrational energy transfer to the dissociation ofH2.This result shows that an appropriate choice of molecular gas mixtures can be used to extend the discharge operating conditions and device size scaling without compromising atom flux production. ©1997 American Institute of Physics.
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