Principle of a Semiconductor Manometer in the Pressure Range of 1 to 10−6mm Hg
作者:
M. Varic´ak,
B. Saftic´,
期刊:
Review of Scientific Instruments
(AIP Available online 1959)
卷期:
Volume 30,
issue 10
页码: 891-895
ISSN:0034-6748
年代: 1959
DOI:10.1063/1.1716375
出版商: AIP
数据来源: AIP
摘要:
Experiments investigating the use of semiconductors for low‐pressure measurements proved that thermistors give the best results. These experiments led to the construction of thermistor systems consisting of miniature thermistors fixed to thin metal foils. With these systems it is possible to measure pressure changes in the range of 1 to 10−6mm Hg. The problem of temperature compensation is discussed and it is shown that in the case of thermistors this problem may be resolved by means of the voltagevscurrent characteristics. A detailed description of the apparatus, including the gauge head as well as the electric circuit and the calibration curves, is given.
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