Parallel atomic force microscopy using cantilevers with integrated piezoresistive sensors and integrated piezoelectric actuators
作者:
S. C. Minne,
S. R. Manalis,
C. F. Quate,
期刊:
Applied Physics Letters
(AIP Available online 1995)
卷期:
Volume 67,
issue 26
页码: 3918-3920
ISSN:0003-6951
年代: 1995
DOI:10.1063/1.115317
出版商: AIP
数据来源: AIP
摘要:
We have fabricated and operated two cantilevers in parallel in a new mode for imaging with the atomic force microscope (AFM). The cantilevers contain both an integrated piezoresistive silicon sensor and an integrated piezoelectric zinc oxide (ZnO) actuator. The integration of sensor and actuator on a single cantilever allows us to simultaneously record two independent AFM images in the constant force mode. The ZnO actuator provides over 4 &mgr;m of deflection at low frequencies (dc) and over 30 &mgr;m deflection at the first resonant frequency. The piezoresistive element is used to detect the strain and provide the feedback signal for the ZnO actuator. ©1995 American Institute of Physics.
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