A micropositioning stage with large travel range has been designed and built. The stage combines a piezoelectric driving element, flexure pivoted multiple Scott–Russell linkage, and a parallel guiding spring. Quality engineering techniques are used to optimize the configuration of the device in order to achieve the maximum displacement gain and the minimum angular deviation. A simple open-loop compensator is applied to reduce the hysteresis of the dynamic response of the stage. The experiment shows that the stage achieved a vacuum-compatible device with a travel of greater than 100 &mgr;m, a resolution of 0.04 &mgr;m, and an angular deviation of less than 31.1 &mgr;rad. The first natural frequency of the stage is 80 Hz and the settling time is approximately 50 ms. Compared with the uncontrolled condition, the controlled hysteresis is reduced significantly. ©1998 American Institute of Physics.