Ti and TiN layers implanted with57Fe ions were studied by conversion electron Mo¨ssbauer spectroscopy at 295 and 80 K. In as‐implanted Ti samples the local states of iron implants were assigned to &agr;‐Ti(Fe) and &bgr;‐Ti(Fe). In TiN, about 68% of iron implants replace Ti atoms forming Fe2N and nonstoichiometric Fe–N complexes. The remaining Fe ions replace N atoms exhibiting &agr;‐Ti(Fe) and &bgr;‐Ti(Fe) states. The protective properties of the TiN cover layer are discussed in terms of changes of the these states after subsequent annealing in air. ©1995 American Institute of Physics.