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Force microscope using a twin‐path interferometer

 

作者: S. Watanabe,   K. Hane,   T. Goto,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1992)
卷期: Volume 10, issue 1  

页码: 1-5

 

ISSN:1071-1023

 

年代: 1992

 

DOI:10.1116/1.586301

 

出版商: American Vacuum Society

 

关键词: INTERFEROMETERS;LASER BEAM APPLICATIONS;USES;SENSITIVITY;MOIRE FRINGES;ATOMIC FORCE MICROSCOPY;SURFACE ANALYSIS

 

数据来源: AIP

 

摘要:

In this article, a force microscope using a twin‐path (common‐path) laser interferometer is presented. The interferometer was developed for the displacement detection of a small cantilever. Since the two interfering beams were very close to each other, the perturbation caused by the environmental disturbances were minimized. The optical path difference between the two beams was easily adjusted by the moire effect of the gratings. The vibrational amplitude of 10−3nm was measured under the resonance conditions of the tungsten lever. The drift rate of the interference signal was less than 10−3nm/s. An etched‐resist coated with thin gold film was imaged by using electrostatic forces under the conditions of ac mode operation.

 

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