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Current density distribution in a chromatically limited electron microprobe

 

作者: D. W. Tuggle,   L. W. Swanson,   M. A. Gesley,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena  （AIP Available online 1986）
卷期: Volume 4, issue 1  

页码: 131-134

 

ISSN:0734-211X

 

年代: 1986

 

DOI:10.1116/1.583363

 

出版商: American Vacuum Society

 

关键词: SPATIAL DISTRIBUTION;CURRENT DENSITY;ELECTRON SPECTRA;SCANNING ELECTRON MICROSCOPY;ELECTRON MICROPROBE ANALYSIS;ELECTRON MICROSCOPES;HIGH−VOLTAGE ELECTRON MICROSCO

 

数据来源: AIP

 

摘要:

Chromatically limited electron‐microprobe systems are quite common in low‐voltage scanning microscopy. The non‐Gaussian blur disk and the asymmetric focal properties of the system are explained by considering the relation between source electron energy distributions and the spatial distribution of the current density in the vicinity of the image plane.

 

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