Interfacial structure and ferroelectric properties of PZT/SrRuO3heterostructures on miscut (001)SrTiO3
作者:
K. Wasa,
Y. Ichikawa,
H. Adachi,
I. Kanno,
K. Setsune,
D.G. Schlom,
S. Trolier-Mckinstry,
Q. Gan,
C.B. Eom,
期刊:
Integrated Ferroelectrics
(Taylor Available online 1999)
卷期:
Volume 26,
issue 1-4
页码: 39-46
ISSN:1058-4587
年代: 1999
DOI:10.1080/10584589908215608
出版商: Taylor & Francis Group
关键词: ferroelectric thin films;PZT thin films;single domain/single crystal
数据来源: Taylor
摘要:
A heterostructure of (001)PZT(53/47)/(110)SrRuO3(SRO) was deposited on a miscut (001)SrTiO3(ST) substrate by a magnetron sputtering. The film thickness of the PZT and SRO ranged from 100nm to 200nm. The miscut angles were typically 1.7°. The heterostructure was grown on the miscut ST substrates under a step-flow growth. The heterostructure was tightly bonded to the ST substrate without an interfacial layer. The sputtered PZT thin films were tetragonally deformed with c=4.16 Å (bulk c-lattice parameter, 4.14 Å). A room temperature dielectric constant of the PZT thin films was 200 to 300 at 1kHz. The P/E hysteresis measurements indicated that the saturation polarization Pswas 40 μ C/cm2with a coercive field Ecof 400 kV/cm to 500 kV/cm. The Ecobserved was one order of magnitude higher than a bulk value for PZT. The high values of Ecwere observed in a perfect c-domain orientation without an interfacial layer or 90° domains.
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