Electrical characterization of an epitaxial ZnSe/epitaxial GaAs heterointerface
作者:
Q. D. Qian,
J. Qiu,
M. Kobayashi,
R. L. Gunshor,
M. R. Melloch,
J. A. Cooper,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1989)
卷期:
Volume 7,
issue 4
页码: 793-798
ISSN:0734-211X
年代: 1989
DOI:10.1116/1.584602
出版商: American Vacuum Society
关键词: ZINC SELENIDES;GALLIUM ARSENIDES;HETEROSTRUCTURES;ELECTRICAL PROPERTIES;CV CHARACTERISTIC;ACCUMULATION LAYERS;INVERSION LAYERS;CONDUCTION BANDS;IV CHARACTERISTIC;ZnSe;GaAs
数据来源: AIP
摘要:
The electrical properties of pseudomorphic epilayer–epilayer ZnSe/GaAs heterointerfaces, grown by molecular‐beam epitaxy, have been investigated by capacitance versus voltage (C–V) and current versus voltage measurements. Undoped stoichiometric ZnSe (<1000 Å), exhibiting high resistivity, performs the function of the insulator in these metal–insulator–semiconductor capacitors. TheC–Vcharacteristics of the annealed Au/ZnSe/p‐GaAs capacitors are nearly ideal, exhibiting an interface state density (2.5×1011cm−2) which compares favorably with the densities reported at typical (Al,Ga)As interfaces. The occurrence of both hole accumulation (forp‐type GaAs) and inversion (forn‐type GaAs) at the ZnSe/GaAs heterointerface indicates the presence of a substantial valence‐band offset. The lack of accumulation or inversion layers for electrons suggests a relatively small conduction‐band discontinuity.
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