首页   按字顺浏览 期刊浏览 卷期浏览 Electrical characterization of an epitaxial ZnSe/epitaxial GaAs heterointerface
Electrical characterization of an epitaxial ZnSe/epitaxial GaAs heterointerface

 

作者: Q. D. Qian,   J. Qiu,   M. Kobayashi,   R. L. Gunshor,   M. R. Melloch,   J. A. Cooper,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena  (AIP Available online 1989)
卷期: Volume 7, issue 4  

页码: 793-798

 

ISSN:0734-211X

 

年代: 1989

 

DOI:10.1116/1.584602

 

出版商: American Vacuum Society

 

关键词: ZINC SELENIDES;GALLIUM ARSENIDES;HETEROSTRUCTURES;ELECTRICAL PROPERTIES;CV CHARACTERISTIC;ACCUMULATION LAYERS;INVERSION LAYERS;CONDUCTION BANDS;IV CHARACTERISTIC;ZnSe;GaAs

 

数据来源: AIP

 

摘要:

The electrical properties of pseudomorphic epilayer–epilayer ZnSe/GaAs heterointerfaces, grown by molecular‐beam epitaxy, have been investigated by capacitance versus voltage (C–V) and current versus voltage measurements. Undoped stoichiometric ZnSe (<1000 Å), exhibiting high resistivity, performs the function of the insulator in these metal–insulator–semiconductor capacitors. TheC–Vcharacteristics of the annealed Au/ZnSe/p‐GaAs capacitors are nearly ideal, exhibiting an interface state density (2.5×1011cm−2) which compares favorably with the densities reported at typical (Al,Ga)As interfaces. The occurrence of both hole accumulation (forp‐type GaAs) and inversion (forn‐type GaAs) at the ZnSe/GaAs heterointerface indicates the presence of a substantial valence‐band offset. The lack of accumulation or inversion layers for electrons suggests a relatively small conduction‐band discontinuity.

 

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